in a normal ccd with front-illuminated ccd structure, the light sensitive pixels have a charge transfer function as well, and this function requires the front surface of light sensitive pixels to be covered by a semi-transparent poly-si electrode for the charge transfer function. the poly-si electrode absorbs some percentage of incoming photons depending on their wavelength. especially of of the uv light is not able to reach the light sensitive pixels. to overcome this disadvantage, in a back-thinned ccd, the ccd is turned upside down and this back side of the ccd is thinned to 10-15 m in thickness. incident photons now enter the ccd from the back-thinned side, without the poly-si electrode in the light path. then qe values of greater than 90 % can be achieved. spectral response spectral response 0 20 40 60 100 80 400 200 600 800 1000 1200 wavelength (nm) quantum efficiency (%) C8000-30 bt-ccd camera C8000-30 system configuration system configuration features features principle principle real time background subtraction recursive filter (2, 4, 8, 16, 32 and 64 frames selectable) the C8000-30 employs an ultrahigh-sensitivity back-thinned ccd sensor made by hamamatsu, which offers extremely high quantum efficiency in a wide range of uv, vis and nir wavelengths. the high uv sensitivity from 120 nm is useful for semiconductor mask inspection and measurement applications. also, the high nir sensitivity is useful for fluorescence measurement, nir ld measurement and so on. high-sensitivity imaging from uv to near- infrared wavelengths - uv: quantum efficiency over 60 % (at 200 nm) - near-infrared: quantum efficiency over 90 % (at 650 nm) quantum efficiency in uv source (reference data) light source wavelength (nm) quantum efficiency (%) (typ.) f 2 157 84 arf 193 57 krf 248 69 fourth harmonic generation of a yag laser i line 365 47 (this is typical, not guaranteed.) 266 50 * uv light irradiation may cause a drop in sensitivity and increase the dark current of the ccd sensor. " " $ " % " 1 5 0 3 1 0 8 & 3 ) " . " . " 5 4 6 lens computer standard options C8000-30 a3472-06 video camera microscope attachment microscope computer frame grabber board * without sapphire window. with the sapphire window, the spectral response is decreased due to the transmittance characteristics of the window. f e gate electrodes light sensitive pixels gate electrodes light sensitive pixels e light light normal ccd (front-illuminated ccd) back-thinned ccd back-thinned ccd camera
dimensional outlines dimensional outlines (unit: mm) product and software package names noted in this documentation are trademarks or registered trademarks of their respective manu facturers. subject to local technical requirements and regulations, availability of products included in this promotional material may var y. please consult your local sales representative. information furnished by hamamatsu is believed to be reliable. however, no responsibility is assumed for possible inaccuracies or omissions. specifications and external appearance are subject to change without notice. . 2010 hamamatsu photonics k.k. hamamatsu photonics k.k., systems division 812 joko-cho, higashi-ku, hamamatsu city, 431-3196, japan, telephone: (81)53-431-0124, fax: (81)53-435-1574, e-mail:export@sys. hpk.co.jp u.s.a. and canada: hamamatsu corporation: 360 foothill road, bridgewater, n.j. 08807-0910, u.s.a., telephone: (1) 908-231-0960, fax: (1)908-231-0 852, e-mail: usa@hamamatsu.com germany: hamamatsu photonics deutschland gmbh: arzbergerstr. 10, d-82211 herrsching am ammersee, germany, telephone: (49)8152-375-0, fa x: (49)8152-2658, e-mail: info@hamamatsu.de , france: hamamatsu photonics france s.a.r.l.: 19, rue du saule trapu, parc du moulin de massy, 91882 massy cedex, france, telephone: (33 )1 69 53 71 00, fax: (33)1 69 53 71 10, e-mail: infos@hamamatsu.fr united kingdom: hamamatsu photonics uk limited: 2 how ard court, 10 tewin road, welwyn garden city, hertfordshire, al7 1bw, u.k., telephone: (44) 1707-294888, fax: (44) 1707-325777, e-mail: info@hamamatsu.co.uk north europe: hamamatsu photonics norden ab: smidesv?gen 12, se-171-41 solna, sweden, telephone: (46)8-509-031-00, fax: (46)8-509-031-01, e- mail: info@hamamatsu.se - italy: hamamatsu photonics italia s.r.l.: strada della moia, 1 int.6-20020 arese (milano), italy, telephone: (39)02-935 81 733, fax: (39)02-935 81 741, e-mail: info@hamamatsu.it cat. no. scas0009e01 jun/2010 hpk created in japan homepage address http://www.hamamatsu.com system specifications options options system specifications * calculated from the ratio of the full well capacity and the average readout noise. ac adaptor: a3472-06 power cable (5 m) : a9071-05 imaging device effective number of pixels cell size effective area readout noise (r.m.s.) (typ.) full well capacity (typ.) cooling method cooling temperature a/d converter exposure time analog gain sub-array external trigger mode image processing functions lens mount interface external control power requirements power consumption ambient storage temperature ambient operating temperature ambient storage/operating humidity back-thinned frame transfer ccd 640 (h) 480 (v) 14 m (h) 14 m (v) 8.96 mm (h) 6.72 mm (v) 31.4 frames/s 58.3 frames/s 101.8 frames/s approx. 100 electrons 30 000 electrons passive air-cooled + 5 ?c (room temperature + 20 ?c) 12 bit 30.8 ms to 1 s approx. 1 to 5 times (16 steps) 8 pixels increments (v) edge trigger, level trigger, start trigger, synchronous readout trigger background subtraction, recursive filter c-mount camera link base configuration camera link dc +12 v approx. 10 v . a - 10 ?c to + 50 ?c 0 ?c to + 40 ?c 70 % max. (with no condensation) type number C8000-30 1 1 2 2 4 4 binning frame rate a3472-06 ac adaptor ??? hamamatsu c 8000 bt-ccd camera 140 1 3.3 2 67.7 1 82 1 2.36 0.5 82 1 8 0.5 18 0.3 32 0.3 41 0.5 1/4-20unc d=8 4-m3 d=8 1-32un c-mount ac adaptor a3472-06 (approx. 0.8 kg) (option) camera head (approx. 1.3 kg)
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